# Who does ASML pay? Who are its key suppliers?
Canonical: https://valuechain.wiki/asml · Facet: suppliers · Updated: 2026-09-11T13:43:40.057372+00:00 · Source: ValueChain.wiki (cited money-flow graph)

**Citable summary**: ASML's confirmed suppliers/cost counterparties include Carl Zeiss SMT, TRUMPF, MKS Instruments plus 3 undisclosed/aggregate relationships. Per the valuechain.wiki graph: 6 cost edges, backed by 8 dated sources, 2 of them primary filings (as of 2026-09-11).

### Carl Zeiss SMT (high)  → /carl-zeiss-smt.md
- note: Sources EUV optics (mirrors) exclusively from Carl Zeiss SMT.
- [confirms] SEC EDGAR (EN, filing, published 2026-02-25) https://www.sec.gov/Archives/edgar/data/937966/000162828026011378/asml-20251231.htm: "ASML 20-F: Carl Zeiss SMT is a key optics supplier."
- [confirms] Korea Economic Daily (KO, news, published 2022-07-31) https://www.hankyung.com/article/2022073164931: "No Zeiss mirrors, no ASML EUV."
- [confirms] ASML (EN, ir, published 2016-11-03) https://www.asml.com/en/news/press-releases/2016/zeiss-and-asml-strengthen-partnership-for-next-generation-of-euv-lithography: "ASML took 24.9% of Carl Zeiss SMT; exclusive EUV optics partner."

### TRUMPF (high)  → /trumpf.md
- note: Sources EUV-source CO2 laser exclusively from TRUMPF.
- [confirms] TRUMPF (EN, ir, published 2025-01-01) https://www.trumpf.com/en_US/solutions/applications/euv-lithography/: "Sources EUV-source CO2 laser exclusively from TRUMPF."
- [confirms] Byline Network (KO, news, published 2022-08-03) https://byline.network/2022/08/03-78/: "Sources EUV-source CO2 laser exclusively from TRUMPF."

### Carl Zeiss SMT (high)  → /carl-zeiss-smt.md
- note: ASML owns 24.9% of Carl Zeiss SMT (€1B).
- [confirms] ASML (EN, ir, published 2016-11-03) https://www.asml.com/en/news/press-releases/2016/zeiss-and-asml-strengthen-partnership-for-next-generation-of-euv-lithography: "ASML owns 24.9% of Carl Zeiss SMT (€1B)."

### TRUMPF (high)  → /trumpf.md
- note: ASML invested directly in EUV partner TRUMPF.
- [confirms] Byline Network (KO, news, published 2022-08-03) https://byline.network/2022/08/03-78/: "ASML invested directly in EUV partner TRUMPF."

### Cymer (mid)
- note: EUV light source (laser) supplier; an ASML subsidiary.
- [mentions] SEC EDGAR (EN, filing, published 2026-02-25) https://www.sec.gov/Archives/edgar/data/937966/000162828026011378/asml-20251231.htm: "ASML 20-F: Cymer provides light-source technology."

### MKS Instruments (mid)  → /mks-instruments.md
- note: Uses MKS RF-power/vacuum subsystems in etch/deposition tools.
- [confirms] Yole Group (EN, research, published 2025-01-01) https://www.yolegroup.com/strategy-insights/critical-subsystems-suppliers-are-the-superstars-of-the-semiconductor-supply-chain/: "Uses MKS RF-power/vacuum subsystems in etch/deposition tools."

### 이코르 (가스 전달 서브시스템) (mid)  → /ichor-holdings.md
- note: Named among Ichor's largest customers by sales in 2025.
- [confirms] SEC EDGAR (EN, filing, published 2026-02-20) https://www.sec.gov/Archives/edgar/data/1652535/000165253526000012/ichr-20251226.htm: "We have long standing relationships with top tier OEM customers, including Lam Research, Applied Materials, and ASML which were our largest customers by sales in 2025. We generated revenue of $947.7 million, $849.0 million, and $811.1 million in 2025, 2024, and 2023, respectively."

### 파커하니핀 (mid)  → /parker-hannifin.md
- note: ASML and its co-makers receive turnkey modules assembled by Parker Fluidic Solutions Europe from components across multiple Parker divisions. ASML named Parker a Valued Supplier in 2024.
- [confirms] Erik van Soerland on LinkedIn (EN, news, published 2024-04-04) https://www.linkedin.com/posts/erik-van-soerland-9730bb16_thursday-april-4th-2024-parker-has-been-rewarded-activity-7182654413977595904-M90x: "Parker manufactures turnkey modules ... assemble and ship them directly to ASML & their co-makers."

Reverse side: https://valuechain.wiki/asml/customers.md · Ripple: https://valuechain.wiki/asml/ripple.md

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Full node: https://valuechain.wiki/asml.md · JSON: https://valuechain.wiki/asml.json